4/12/2011	7:20:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/12/2011	7:20:32 AM	Recipe started at 7:20 AM
4/12/2011	7:20:32 AM	H2 valve closed
4/12/2011	7:20:32 AM	BCl3 valve closed
4/12/2011	7:20:32 AM	PH3 valve closed
4/12/2011	7:20:32 AM	SiCl4 pre valve closed
4/12/2011	7:20:32 AM	SiCl4 post valve closed
4/12/2011	7:20:32 AM	Main Vac valve closed
4/12/2011	7:20:32 AM	Bypass valve closed
4/12/2011	7:20:32 AM	Bubbler valve closed
4/12/2011	7:20:32 AM	Helium valve opened
4/12/2011	7:20:32 AM	Helium MFC set to  500.000000
4/12/2011	7:20:32 AM	H2 MFC set to  0.000000
4/12/2011	7:20:32 AM	BCl3 MFC set to  0.000000
4/12/2011	7:20:32 AM	PHl3 MFC set to  0.000000
4/12/2011	7:20:32 AM	SiCl4 MFC set to  0.000000
4/12/2011	7:20:32 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	7:20:32 AM	Tube furnace set to 0
4/12/2011	7:21:53 AM	Helium valve closed
4/12/2011	7:21:53 AM	H2 valve closed
4/12/2011	7:21:53 AM	BCl3 valve closed
4/12/2011	7:21:53 AM	PH3 valve closed
4/12/2011	7:21:53 AM	SiCl4 pre valve closed
4/12/2011	7:21:53 AM	SiCl4 post valve closed
4/12/2011	7:21:53 AM	Main Vac valve closed
4/12/2011	7:21:53 AM	Bypass valve closed
4/12/2011	7:21:53 AM	Bubbler valve closed
4/12/2011	7:21:53 AM	Helium MFC set to  0.000000
4/12/2011	7:21:53 AM	H2 MFC set to  0.000000
4/12/2011	7:21:53 AM	BCl3 MFC set to  0.000000
4/12/2011	7:21:53 AM	PHl3 MFC set to  0.000000
4/12/2011	7:21:53 AM	SiCl4 MFC set to  0.000000
4/12/2011	7:21:53 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	7:21:53 AM	Tube furnace set to 0
4/12/2011	7:21:54 AM	Run finished at 7:21 AM
4/12/2011	7:21:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/12/2011	7:24:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	7:24:34 AM	Recipe started at 7:24 AM
4/12/2011	7:24:34 AM	Helium valve closed
4/12/2011	7:24:34 AM	H2 valve closed
4/12/2011	7:24:34 AM	BCl3 valve closed
4/12/2011	7:24:34 AM	PH3 valve closed
4/12/2011	7:24:34 AM	SiCl4 pre valve closed
4/12/2011	7:24:34 AM	SiCl4 post valve closed
4/12/2011	7:24:34 AM	Main Vac valve closed
4/12/2011	7:24:34 AM	Bubbler valve closed
4/12/2011	7:24:34 AM	Bypass valve opened
4/12/2011	7:24:34 AM	Helium MFC set to  0.000000
4/12/2011	7:24:34 AM	H2 MFC set to  0.000000
4/12/2011	7:24:34 AM	BCl3 MFC set to  0.000000
4/12/2011	7:24:34 AM	PHl3 MFC set to  0.000000
4/12/2011	7:24:34 AM	SiCl4 MFC set to  0.000000
4/12/2011	7:24:34 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	7:24:34 AM	Tube furnace set to 0
4/12/2011	7:25:06 AM	Helium valve closed
4/12/2011	7:25:06 AM	H2 valve closed
4/12/2011	7:25:06 AM	BCl3 valve closed
4/12/2011	7:25:06 AM	PH3 valve closed
4/12/2011	7:25:06 AM	SiCl4 pre valve closed
4/12/2011	7:25:06 AM	SiCl4 post valve closed
4/12/2011	7:25:06 AM	Bubbler valve closed
4/12/2011	7:25:06 AM	Main Vac valve opened
4/12/2011	7:25:06 AM	Bypass valve opened
4/12/2011	7:25:06 AM	Helium MFC set to  0.000000
4/12/2011	7:25:06 AM	H2 MFC set to  0.000000
4/12/2011	7:25:06 AM	BCl3 MFC set to  0.000000
4/12/2011	7:25:06 AM	PHl3 MFC set to  0.000000
4/12/2011	7:25:06 AM	SiCl4 MFC set to  0.000000
4/12/2011	7:25:06 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	7:25:06 AM	Tube furnace set to 0
4/12/2011	7:25:06 AM	Run finished at 7:25 AM
4/12/2011	7:25:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	9:19:39 AM	Recipe started at 9:19 AM
4/12/2011	9:19:39 AM	Helium valve closed
4/12/2011	9:19:39 AM	BCl3 valve closed
4/12/2011	9:19:39 AM	PH3 valve closed
4/12/2011	9:19:39 AM	SiCl4 pre valve closed
4/12/2011	9:19:39 AM	SiCl4 post valve closed
4/12/2011	9:19:39 AM	Main Vac valve closed
4/12/2011	9:19:39 AM	Bypass valve closed
4/12/2011	9:19:39 AM	Bubbler valve closed
4/12/2011	9:19:39 AM	H2 valve opened
4/12/2011	9:19:39 AM	Helium MFC set to  0.000000
4/12/2011	9:19:39 AM	H2 MFC set to  500.000000
4/12/2011	9:19:39 AM	BCl3 MFC set to  0.000000
4/12/2011	9:19:39 AM	PHl3 MFC set to  0.000000
4/12/2011	9:19:39 AM	SiCl4 MFC set to  0.000000
4/12/2011	9:19:39 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:19:39 AM	Tube furnace set to 0
4/12/2011	9:21:03 AM	Helium valve closed
4/12/2011	9:21:03 AM	BCl3 valve closed
4/12/2011	9:21:03 AM	PH3 valve closed
4/12/2011	9:21:03 AM	SiCl4 pre valve closed
4/12/2011	9:21:03 AM	SiCl4 post valve closed
4/12/2011	9:21:03 AM	Main Vac valve closed
4/12/2011	9:21:03 AM	Bypass valve closed
4/12/2011	9:21:03 AM	H2 valve opened
4/12/2011	9:21:03 AM	Bubbler valve opened
4/12/2011	9:21:03 AM	Helium MFC set to  0.000000
4/12/2011	9:21:03 AM	H2 MFC set to  500.000000
4/12/2011	9:21:03 AM	BCl3 MFC set to  0.000000
4/12/2011	9:21:03 AM	PHl3 MFC set to  0.000000
4/12/2011	9:21:03 AM	SiCl4 MFC set to  0.000000
4/12/2011	9:21:03 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:21:03 AM	Tube furnace set to 1000
4/12/2011	9:41:03 AM	Helium valve closed
4/12/2011	9:41:03 AM	PH3 valve closed
4/12/2011	9:41:03 AM	Main Vac valve closed
4/12/2011	9:41:03 AM	Bypass valve closed
4/12/2011	9:41:03 AM	H2 valve opened
4/12/2011	9:41:03 AM	BCl3 valve opened
4/12/2011	9:41:03 AM	SiCl4 pre valve opened
4/12/2011	9:41:03 AM	SiCl4 post valve opened
4/12/2011	9:41:03 AM	Bubbler valve opened
4/12/2011	9:41:03 AM	Helium MFC set to  0.000000
4/12/2011	9:41:03 AM	H2 MFC set to  500.000000
4/12/2011	9:41:03 AM	BCl3 MFC set to  3.000000
4/12/2011	9:41:03 AM	PHl3 MFC set to  0.000000
4/12/2011	9:41:03 AM	SiCl4 MFC set to  50.000000
4/12/2011	9:41:03 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:41:03 AM	Tube furnace set to 1000
4/12/2011	10:01:03 AM	H2 valve closed
4/12/2011	10:01:03 AM	BCl3 valve closed
4/12/2011	10:01:03 AM	PH3 valve closed
4/12/2011	10:01:03 AM	SiCl4 pre valve closed
4/12/2011	10:01:03 AM	SiCl4 post valve closed
4/12/2011	10:01:03 AM	Main Vac valve closed
4/12/2011	10:01:03 AM	Bypass valve closed
4/12/2011	10:01:03 AM	Helium valve opened
4/12/2011	10:01:03 AM	Bubbler valve opened
4/12/2011	10:01:03 AM	Helium MFC set to  500.000000
4/12/2011	10:01:03 AM	H2 MFC set to  0.000000
4/12/2011	10:01:03 AM	BCl3 MFC set to  0.000000
4/12/2011	10:01:03 AM	PHl3 MFC set to  0.000000
4/12/2011	10:01:03 AM	SiCl4 MFC set to  0.000000
4/12/2011	10:01:03 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:01:03 AM	Tube furnace set to 0
4/12/2011	10:21:03 AM	Helium valve closed
4/12/2011	10:21:03 AM	H2 valve closed
4/12/2011	10:21:03 AM	BCl3 valve closed
4/12/2011	10:21:03 AM	PH3 valve closed
4/12/2011	10:21:03 AM	SiCl4 pre valve closed
4/12/2011	10:21:03 AM	SiCl4 post valve closed
4/12/2011	10:21:03 AM	Main Vac valve closed
4/12/2011	10:21:03 AM	Bypass valve closed
4/12/2011	10:21:03 AM	Bubbler valve closed
4/12/2011	10:21:03 AM	Helium MFC set to  0.000000
4/12/2011	10:21:03 AM	H2 MFC set to  0.000000
4/12/2011	10:21:03 AM	BCl3 MFC set to  0.000000
4/12/2011	10:21:03 AM	PHl3 MFC set to  0.000000
4/12/2011	10:21:03 AM	SiCl4 MFC set to  0.000000
4/12/2011	10:21:03 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:21:03 AM	Tube furnace set to 0
4/12/2011	10:21:04 AM	Run finished at 10:21 AM
4/12/2011	10:28:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/12/2011	10:28:11 AM	Recipe started at 10:28 AM
4/12/2011	10:28:11 AM	H2 valve closed
4/12/2011	10:28:11 AM	BCl3 valve closed
4/12/2011	10:28:11 AM	PH3 valve closed
4/12/2011	10:28:11 AM	SiCl4 pre valve closed
4/12/2011	10:28:11 AM	SiCl4 post valve closed
4/12/2011	10:28:11 AM	Main Vac valve closed
4/12/2011	10:28:11 AM	Bypass valve closed
4/12/2011	10:28:11 AM	Bubbler valve closed
4/12/2011	10:28:11 AM	Helium valve opened
4/12/2011	10:28:11 AM	Helium MFC set to  500.000000
4/12/2011	10:28:11 AM	H2 MFC set to  0.000000
4/12/2011	10:28:11 AM	BCl3 MFC set to  0.000000
4/12/2011	10:28:11 AM	PHl3 MFC set to  0.000000
4/12/2011	10:28:11 AM	SiCl4 MFC set to  0.000000
4/12/2011	10:28:11 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:28:11 AM	Tube furnace set to 0
4/12/2011	10:28:14 AM	Helium valve closed
4/12/2011	10:28:14 AM	H2 valve closed
4/12/2011	10:28:14 AM	BCl3 valve closed
4/12/2011	10:28:14 AM	PH3 valve closed
4/12/2011	10:28:14 AM	SiCl4 pre valve closed
4/12/2011	10:28:14 AM	SiCl4 post valve closed
4/12/2011	10:28:14 AM	Main Vac valve closed
4/12/2011	10:28:14 AM	Bypass valve closed
4/12/2011	10:28:14 AM	Bubbler valve closed
4/12/2011	10:28:14 AM	Helium MFC set to  0.000000
4/12/2011	10:28:14 AM	H2 MFC set to  0.000000
4/12/2011	10:28:14 AM	BCl3 MFC set to  0.000000
4/12/2011	10:28:14 AM	PHl3 MFC set to  0.000000
4/12/2011	10:28:14 AM	SiCl4 MFC set to  0.000000
4/12/2011	10:28:14 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:28:14 AM	Tube furnace set to 0
4/12/2011	10:28:14 AM	Run finished at 10:28 AM
4/12/2011	10:28:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/12/2011	10:36:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	10:36:58 AM	Recipe started at 10:36 AM
4/12/2011	10:36:58 AM	Helium valve closed
4/12/2011	10:36:58 AM	H2 valve closed
4/12/2011	10:36:58 AM	BCl3 valve closed
4/12/2011	10:36:58 AM	PH3 valve closed
4/12/2011	10:36:58 AM	SiCl4 pre valve closed
4/12/2011	10:36:58 AM	SiCl4 post valve closed
4/12/2011	10:36:58 AM	Main Vac valve closed
4/12/2011	10:36:58 AM	Bubbler valve closed
4/12/2011	10:36:58 AM	Bypass valve opened
4/12/2011	10:36:58 AM	Helium MFC set to  0.000000
4/12/2011	10:36:58 AM	H2 MFC set to  0.000000
4/12/2011	10:36:58 AM	BCl3 MFC set to  0.000000
4/12/2011	10:36:58 AM	PHl3 MFC set to  0.000000
4/12/2011	10:36:58 AM	SiCl4 MFC set to  0.000000
4/12/2011	10:36:58 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:36:58 AM	Tube furnace set to 0
4/12/2011	10:37:31 AM	Helium valve closed
4/12/2011	10:37:31 AM	H2 valve closed
4/12/2011	10:37:31 AM	BCl3 valve closed
4/12/2011	10:37:31 AM	PH3 valve closed
4/12/2011	10:37:31 AM	SiCl4 pre valve closed
4/12/2011	10:37:31 AM	SiCl4 post valve closed
4/12/2011	10:37:31 AM	Bubbler valve closed
4/12/2011	10:37:31 AM	Main Vac valve opened
4/12/2011	10:37:31 AM	Bypass valve opened
4/12/2011	10:37:31 AM	Helium MFC set to  0.000000
4/12/2011	10:37:31 AM	H2 MFC set to  0.000000
4/12/2011	10:37:31 AM	BCl3 MFC set to  0.000000
4/12/2011	10:37:31 AM	PHl3 MFC set to  0.000000
4/12/2011	10:37:31 AM	SiCl4 MFC set to  0.000000
4/12/2011	10:37:31 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:37:31 AM	Tube furnace set to 0
4/12/2011	10:37:31 AM	Run finished at 10:37 AM
4/12/2011	10:37:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	11:52:09 AM	Recipe started at 11:52 AM
4/12/2011	11:52:09 AM	Helium valve closed
4/12/2011	11:52:09 AM	BCl3 valve closed
4/12/2011	11:52:09 AM	PH3 valve closed
4/12/2011	11:52:09 AM	SiCl4 pre valve closed
4/12/2011	11:52:09 AM	SiCl4 post valve closed
4/12/2011	11:52:09 AM	Main Vac valve closed
4/12/2011	11:52:09 AM	Bypass valve closed
4/12/2011	11:52:09 AM	Bubbler valve closed
4/12/2011	11:52:09 AM	H2 valve opened
4/12/2011	11:52:09 AM	Helium MFC set to  0.000000
4/12/2011	11:52:09 AM	H2 MFC set to  500.000000
4/12/2011	11:52:09 AM	BCl3 MFC set to  0.000000
4/12/2011	11:52:09 AM	PHl3 MFC set to  0.000000
4/12/2011	11:52:09 AM	SiCl4 MFC set to  0.000000
4/12/2011	11:52:09 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	11:52:09 AM	Tube furnace set to 0
4/12/2011	11:52:53 AM	Run aborted at 11:52 AM
4/12/2011	11:52:53 AM	Helium valve closed
4/12/2011	11:52:53 AM	H2 valve closed
4/12/2011	11:52:53 AM	BCl3 valve closed
4/12/2011	11:52:53 AM	PH3 valve closed
4/12/2011	11:52:53 AM	SiCl4 pre valve closed
4/12/2011	11:52:53 AM	SiCl4 post valve closed
4/12/2011	11:52:53 AM	Bypass valve closed
4/12/2011	11:52:53 AM	Main Vac valve closed
4/12/2011	11:52:53 AM	Bubbler valve closed
4/12/2011	11:52:53 AM	Helium MFC set to  0.000000
4/12/2011	11:52:53 AM	H2 MFC set to  0.000000
4/12/2011	11:52:53 AM	BCl3 MFC set to  0.000000
4/12/2011	11:52:53 AM	PHl3 MFC set to  0.000000
4/12/2011	11:52:53 AM	SiCl4 MFC set to  0.000000
4/12/2011	11:52:53 AM	Tube furnace set to 0
4/12/2011	11:53:02 AM	Recipe started at 11:53 AM
4/12/2011	11:53:02 AM	Helium valve closed
4/12/2011	11:53:02 AM	BCl3 valve closed
4/12/2011	11:53:02 AM	PH3 valve closed
4/12/2011	11:53:02 AM	SiCl4 pre valve closed
4/12/2011	11:53:02 AM	SiCl4 post valve closed
4/12/2011	11:53:02 AM	Main Vac valve closed
4/12/2011	11:53:02 AM	Bypass valve closed
4/12/2011	11:53:02 AM	Bubbler valve closed
4/12/2011	11:53:02 AM	H2 valve opened
4/12/2011	11:53:02 AM	Helium MFC set to  0.000000
4/12/2011	11:53:02 AM	H2 MFC set to  500.000000
4/12/2011	11:53:02 AM	BCl3 MFC set to  0.000000
4/12/2011	11:53:02 AM	PHl3 MFC set to  0.000000
4/12/2011	11:53:02 AM	SiCl4 MFC set to  0.000000
4/12/2011	11:53:02 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	11:53:02 AM	Tube furnace set to 0
4/12/2011	11:53:38 AM	Helium valve closed
4/12/2011	11:53:38 AM	BCl3 valve closed
4/12/2011	11:53:38 AM	PH3 valve closed
4/12/2011	11:53:38 AM	SiCl4 pre valve closed
4/12/2011	11:53:38 AM	SiCl4 post valve closed
4/12/2011	11:53:38 AM	Main Vac valve closed
4/12/2011	11:53:38 AM	Bypass valve closed
4/12/2011	11:53:38 AM	H2 valve opened
4/12/2011	11:53:38 AM	Bubbler valve opened
4/12/2011	11:53:38 AM	Helium MFC set to  0.000000
4/12/2011	11:53:38 AM	H2 MFC set to  500.000000
4/12/2011	11:53:38 AM	BCl3 MFC set to  0.000000
4/12/2011	11:53:38 AM	PHl3 MFC set to  0.000000
4/12/2011	11:53:38 AM	SiCl4 MFC set to  0.000000
4/12/2011	11:53:38 AM	Bypass solenoid MFC set to  0.000000
4/12/2011	11:53:38 AM	Tube furnace set to 1000
4/12/2011	12:18:38 PM	Helium valve closed
4/12/2011	12:18:38 PM	PH3 valve closed
4/12/2011	12:18:38 PM	Main Vac valve closed
4/12/2011	12:18:38 PM	Bypass valve closed
4/12/2011	12:18:38 PM	H2 valve opened
4/12/2011	12:18:38 PM	BCl3 valve opened
4/12/2011	12:18:38 PM	SiCl4 pre valve opened
4/12/2011	12:18:38 PM	SiCl4 post valve opened
4/12/2011	12:18:38 PM	Bubbler valve opened
4/12/2011	12:18:38 PM	Helium MFC set to  0.000000
4/12/2011	12:18:38 PM	H2 MFC set to  500.000000
4/12/2011	12:18:38 PM	BCl3 MFC set to  3.000000
4/12/2011	12:18:38 PM	PHl3 MFC set to  0.000000
4/12/2011	12:18:38 PM	SiCl4 MFC set to  50.000000
4/12/2011	12:18:38 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	12:18:38 PM	Tube furnace set to 1000
4/12/2011	12:38:38 PM	H2 valve closed
4/12/2011	12:38:38 PM	BCl3 valve closed
4/12/2011	12:38:38 PM	PH3 valve closed
4/12/2011	12:38:38 PM	SiCl4 pre valve closed
4/12/2011	12:38:38 PM	SiCl4 post valve closed
4/12/2011	12:38:38 PM	Main Vac valve closed
4/12/2011	12:38:38 PM	Bypass valve closed
4/12/2011	12:38:38 PM	Helium valve opened
4/12/2011	12:38:38 PM	Bubbler valve opened
4/12/2011	12:38:38 PM	Helium MFC set to  500.000000
4/12/2011	12:38:38 PM	H2 MFC set to  0.000000
4/12/2011	12:38:38 PM	BCl3 MFC set to  0.000000
4/12/2011	12:38:38 PM	PHl3 MFC set to  0.000000
4/12/2011	12:38:38 PM	SiCl4 MFC set to  0.000000
4/12/2011	12:38:38 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	12:38:38 PM	Tube furnace set to 0
4/12/2011	12:58:39 PM	Helium valve closed
4/12/2011	12:58:39 PM	H2 valve closed
4/12/2011	12:58:39 PM	BCl3 valve closed
4/12/2011	12:58:39 PM	PH3 valve closed
4/12/2011	12:58:39 PM	SiCl4 pre valve closed
4/12/2011	12:58:39 PM	SiCl4 post valve closed
4/12/2011	12:58:39 PM	Main Vac valve closed
4/12/2011	12:58:39 PM	Bypass valve closed
4/12/2011	12:58:39 PM	Bubbler valve closed
4/12/2011	12:58:39 PM	Helium MFC set to  0.000000
4/12/2011	12:58:39 PM	H2 MFC set to  0.000000
4/12/2011	12:58:39 PM	BCl3 MFC set to  0.000000
4/12/2011	12:58:39 PM	PHl3 MFC set to  0.000000
4/12/2011	12:58:39 PM	SiCl4 MFC set to  0.000000
4/12/2011	12:58:39 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	12:58:39 PM	Tube furnace set to 0
4/12/2011	12:58:39 PM	Run finished at 12:58 PM
4/12/2011	1:00:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	1:00:19 PM	Recipe started at 1:00 PM
4/12/2011	1:00:19 PM	Helium valve closed
4/12/2011	1:00:19 PM	H2 valve closed
4/12/2011	1:00:19 PM	BCl3 valve closed
4/12/2011	1:00:19 PM	PH3 valve closed
4/12/2011	1:00:19 PM	SiCl4 pre valve closed
4/12/2011	1:00:19 PM	SiCl4 post valve closed
4/12/2011	1:00:19 PM	Main Vac valve closed
4/12/2011	1:00:19 PM	Bubbler valve closed
4/12/2011	1:00:19 PM	Bypass valve opened
4/12/2011	1:00:19 PM	Helium MFC set to  0.000000
4/12/2011	1:00:19 PM	H2 MFC set to  0.000000
4/12/2011	1:00:19 PM	BCl3 MFC set to  0.000000
4/12/2011	1:00:19 PM	PHl3 MFC set to  0.000000
4/12/2011	1:00:19 PM	SiCl4 MFC set to  0.000000
4/12/2011	1:00:19 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	1:00:19 PM	Tube furnace set to 0
4/12/2011	1:00:50 PM	Helium valve closed
4/12/2011	1:00:50 PM	H2 valve closed
4/12/2011	1:00:50 PM	BCl3 valve closed
4/12/2011	1:00:50 PM	PH3 valve closed
4/12/2011	1:00:50 PM	SiCl4 pre valve closed
4/12/2011	1:00:50 PM	SiCl4 post valve closed
4/12/2011	1:00:50 PM	Bubbler valve closed
4/12/2011	1:00:50 PM	Main Vac valve opened
4/12/2011	1:00:50 PM	Bypass valve opened
4/12/2011	1:00:50 PM	Helium MFC set to  0.000000
4/12/2011	1:00:50 PM	H2 MFC set to  0.000000
4/12/2011	1:00:50 PM	BCl3 MFC set to  0.000000
4/12/2011	1:00:50 PM	PHl3 MFC set to  0.000000
4/12/2011	1:00:50 PM	SiCl4 MFC set to  0.000000
4/12/2011	1:00:50 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	1:00:50 PM	Tube furnace set to 0
4/12/2011	1:00:50 PM	Run finished at 1:00 PM
4/12/2011	1:00:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	2:07:25 PM	Recipe started at 2:07 PM
4/12/2011	2:07:25 PM	Helium valve closed
4/12/2011	2:07:25 PM	BCl3 valve closed
4/12/2011	2:07:25 PM	PH3 valve closed
4/12/2011	2:07:25 PM	SiCl4 pre valve closed
4/12/2011	2:07:25 PM	SiCl4 post valve closed
4/12/2011	2:07:25 PM	Main Vac valve closed
4/12/2011	2:07:25 PM	Bypass valve closed
4/12/2011	2:07:25 PM	Bubbler valve closed
4/12/2011	2:07:25 PM	H2 valve opened
4/12/2011	2:07:25 PM	Helium MFC set to  0.000000
4/12/2011	2:07:25 PM	H2 MFC set to  500.000000
4/12/2011	2:07:25 PM	BCl3 MFC set to  0.000000
4/12/2011	2:07:25 PM	PHl3 MFC set to  0.000000
4/12/2011	2:07:25 PM	SiCl4 MFC set to  0.000000
4/12/2011	2:07:25 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	2:07:26 PM	Tube furnace set to 0
4/12/2011	2:08:43 PM	Helium valve closed
4/12/2011	2:08:43 PM	BCl3 valve closed
4/12/2011	2:08:43 PM	PH3 valve closed
4/12/2011	2:08:43 PM	SiCl4 pre valve closed
4/12/2011	2:08:43 PM	SiCl4 post valve closed
4/12/2011	2:08:43 PM	Main Vac valve closed
4/12/2011	2:08:43 PM	Bypass valve closed
4/12/2011	2:08:43 PM	H2 valve opened
4/12/2011	2:08:43 PM	Bubbler valve opened
4/12/2011	2:08:43 PM	Helium MFC set to  0.000000
4/12/2011	2:08:43 PM	H2 MFC set to  500.000000
4/12/2011	2:08:43 PM	BCl3 MFC set to  0.000000
4/12/2011	2:08:43 PM	PHl3 MFC set to  0.000000
4/12/2011	2:08:43 PM	SiCl4 MFC set to  0.000000
4/12/2011	2:08:43 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	2:08:44 PM	Tube furnace set to 1000
4/12/2011	2:28:44 PM	Helium valve closed
4/12/2011	2:28:44 PM	PH3 valve closed
4/12/2011	2:28:44 PM	Main Vac valve closed
4/12/2011	2:28:44 PM	Bypass valve closed
4/12/2011	2:28:44 PM	H2 valve opened
4/12/2011	2:28:44 PM	BCl3 valve opened
4/12/2011	2:28:44 PM	SiCl4 pre valve opened
4/12/2011	2:28:44 PM	SiCl4 post valve opened
4/12/2011	2:28:44 PM	Bubbler valve opened
4/12/2011	2:28:44 PM	Helium MFC set to  0.000000
4/12/2011	2:28:44 PM	H2 MFC set to  500.000000
4/12/2011	2:28:44 PM	BCl3 MFC set to  3.000000
4/12/2011	2:28:44 PM	PHl3 MFC set to  0.000000
4/12/2011	2:28:44 PM	SiCl4 MFC set to  50.000000
4/12/2011	2:28:44 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	2:28:44 PM	Tube furnace set to 1000
4/12/2011	2:48:44 PM	H2 valve closed
4/12/2011	2:48:44 PM	BCl3 valve closed
4/12/2011	2:48:44 PM	PH3 valve closed
4/12/2011	2:48:44 PM	SiCl4 pre valve closed
4/12/2011	2:48:44 PM	SiCl4 post valve closed
4/12/2011	2:48:44 PM	Main Vac valve closed
4/12/2011	2:48:44 PM	Bypass valve closed
4/12/2011	2:48:44 PM	Helium valve opened
4/12/2011	2:48:44 PM	Bubbler valve opened
4/12/2011	2:48:44 PM	Helium MFC set to  500.000000
4/12/2011	2:48:44 PM	H2 MFC set to  0.000000
4/12/2011	2:48:44 PM	BCl3 MFC set to  0.000000
4/12/2011	2:48:44 PM	PHl3 MFC set to  0.000000
4/12/2011	2:48:44 PM	SiCl4 MFC set to  0.000000
4/12/2011	2:48:44 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	2:48:44 PM	Tube furnace set to 0
4/12/2011	3:08:44 PM	Helium valve closed
4/12/2011	3:08:44 PM	H2 valve closed
4/12/2011	3:08:44 PM	BCl3 valve closed
4/12/2011	3:08:44 PM	PH3 valve closed
4/12/2011	3:08:44 PM	SiCl4 pre valve closed
4/12/2011	3:08:44 PM	SiCl4 post valve closed
4/12/2011	3:08:44 PM	Main Vac valve closed
4/12/2011	3:08:44 PM	Bypass valve closed
4/12/2011	3:08:44 PM	Bubbler valve closed
4/12/2011	3:08:44 PM	Helium MFC set to  0.000000
4/12/2011	3:08:44 PM	H2 MFC set to  0.000000
4/12/2011	3:08:44 PM	BCl3 MFC set to  0.000000
4/12/2011	3:08:44 PM	PHl3 MFC set to  0.000000
4/12/2011	3:08:44 PM	SiCl4 MFC set to  0.000000
4/12/2011	3:08:44 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	3:08:44 PM	Tube furnace set to 0
4/12/2011	3:08:45 PM	Run finished at 3:08 PM
4/12/2011	3:15:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	3:15:13 PM	Recipe started at 3:15 PM
4/12/2011	3:15:13 PM	Helium valve closed
4/12/2011	3:15:13 PM	H2 valve closed
4/12/2011	3:15:13 PM	BCl3 valve closed
4/12/2011	3:15:13 PM	PH3 valve closed
4/12/2011	3:15:13 PM	SiCl4 pre valve closed
4/12/2011	3:15:13 PM	SiCl4 post valve closed
4/12/2011	3:15:13 PM	Main Vac valve closed
4/12/2011	3:15:13 PM	Bubbler valve closed
4/12/2011	3:15:13 PM	Bypass valve opened
4/12/2011	3:15:13 PM	Helium MFC set to  0.000000
4/12/2011	3:15:13 PM	H2 MFC set to  0.000000
4/12/2011	3:15:13 PM	BCl3 MFC set to  0.000000
4/12/2011	3:15:13 PM	PHl3 MFC set to  0.000000
4/12/2011	3:15:13 PM	SiCl4 MFC set to  0.000000
4/12/2011	3:15:13 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	3:15:14 PM	Tube furnace set to 0
4/12/2011	3:15:45 PM	Helium valve closed
4/12/2011	3:15:45 PM	H2 valve closed
4/12/2011	3:15:45 PM	BCl3 valve closed
4/12/2011	3:15:45 PM	PH3 valve closed
4/12/2011	3:15:45 PM	SiCl4 pre valve closed
4/12/2011	3:15:45 PM	SiCl4 post valve closed
4/12/2011	3:15:45 PM	Bubbler valve closed
4/12/2011	3:15:45 PM	Main Vac valve opened
4/12/2011	3:15:45 PM	Bypass valve opened
4/12/2011	3:15:45 PM	Helium MFC set to  0.000000
4/12/2011	3:15:45 PM	H2 MFC set to  0.000000
4/12/2011	3:15:45 PM	BCl3 MFC set to  0.000000
4/12/2011	3:15:45 PM	PHl3 MFC set to  0.000000
4/12/2011	3:15:45 PM	SiCl4 MFC set to  0.000000
4/12/2011	3:15:45 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	3:15:45 PM	Tube furnace set to 0
4/12/2011	3:15:45 PM	Run finished at 3:15 PM
4/12/2011	3:15:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	5:34:47 PM	Recipe started at 5:34 PM
4/12/2011	5:34:47 PM	Helium valve closed
4/12/2011	5:34:47 PM	BCl3 valve closed
4/12/2011	5:34:47 PM	PH3 valve closed
4/12/2011	5:34:47 PM	SiCl4 pre valve closed
4/12/2011	5:34:47 PM	SiCl4 post valve closed
4/12/2011	5:34:47 PM	Main Vac valve closed
4/12/2011	5:34:47 PM	Bypass valve closed
4/12/2011	5:34:47 PM	Bubbler valve closed
4/12/2011	5:34:47 PM	H2 valve opened
4/12/2011	5:34:47 PM	Helium MFC set to  0.000000
4/12/2011	5:34:47 PM	H2 MFC set to  500.000000
4/12/2011	5:34:47 PM	BCl3 MFC set to  0.000000
4/12/2011	5:34:47 PM	PHl3 MFC set to  0.000000
4/12/2011	5:34:47 PM	SiCl4 MFC set to  0.000000
4/12/2011	5:34:47 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	5:34:48 PM	Tube furnace set to 0
4/12/2011	5:36:08 PM	Helium valve closed
4/12/2011	5:36:08 PM	BCl3 valve closed
4/12/2011	5:36:08 PM	PH3 valve closed
4/12/2011	5:36:08 PM	SiCl4 pre valve closed
4/12/2011	5:36:08 PM	SiCl4 post valve closed
4/12/2011	5:36:08 PM	Main Vac valve closed
4/12/2011	5:36:08 PM	Bypass valve closed
4/12/2011	5:36:08 PM	H2 valve opened
4/12/2011	5:36:08 PM	Bubbler valve opened
4/12/2011	5:36:08 PM	Helium MFC set to  0.000000
4/12/2011	5:36:08 PM	H2 MFC set to  500.000000
4/12/2011	5:36:08 PM	BCl3 MFC set to  0.000000
4/12/2011	5:36:08 PM	PHl3 MFC set to  0.000000
4/12/2011	5:36:08 PM	SiCl4 MFC set to  0.000000
4/12/2011	5:36:08 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	5:36:09 PM	Tube furnace set to 1000
4/12/2011	5:56:09 PM	Helium valve closed
4/12/2011	5:56:09 PM	PH3 valve closed
4/12/2011	5:56:09 PM	Main Vac valve closed
4/12/2011	5:56:09 PM	Bypass valve closed
4/12/2011	5:56:09 PM	H2 valve opened
4/12/2011	5:56:09 PM	BCl3 valve opened
4/12/2011	5:56:09 PM	SiCl4 pre valve opened
4/12/2011	5:56:09 PM	SiCl4 post valve opened
4/12/2011	5:56:09 PM	Bubbler valve opened
4/12/2011	5:56:09 PM	Helium MFC set to  0.000000
4/12/2011	5:56:09 PM	H2 MFC set to  500.000000
4/12/2011	5:56:09 PM	BCl3 MFC set to  3.000000
4/12/2011	5:56:09 PM	PHl3 MFC set to  0.000000
4/12/2011	5:56:09 PM	SiCl4 MFC set to  50.000000
4/12/2011	5:56:09 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	5:56:09 PM	Tube furnace set to 1000
4/12/2011	6:16:09 PM	H2 valve closed
4/12/2011	6:16:09 PM	BCl3 valve closed
4/12/2011	6:16:09 PM	PH3 valve closed
4/12/2011	6:16:09 PM	SiCl4 pre valve closed
4/12/2011	6:16:09 PM	SiCl4 post valve closed
4/12/2011	6:16:09 PM	Main Vac valve closed
4/12/2011	6:16:09 PM	Bypass valve closed
4/12/2011	6:16:09 PM	Helium valve opened
4/12/2011	6:16:09 PM	Bubbler valve opened
4/12/2011	6:16:09 PM	Helium MFC set to  500.000000
4/12/2011	6:16:09 PM	H2 MFC set to  0.000000
4/12/2011	6:16:09 PM	BCl3 MFC set to  0.000000
4/12/2011	6:16:09 PM	PHl3 MFC set to  0.000000
4/12/2011	6:16:09 PM	SiCl4 MFC set to  0.000000
4/12/2011	6:16:09 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	6:16:09 PM	Tube furnace set to 0
4/12/2011	6:33:10 PM	Helium valve closed
4/12/2011	6:33:10 PM	H2 valve closed
4/12/2011	6:33:10 PM	BCl3 valve closed
4/12/2011	6:33:10 PM	PH3 valve closed
4/12/2011	6:33:10 PM	SiCl4 pre valve closed
4/12/2011	6:33:10 PM	SiCl4 post valve closed
4/12/2011	6:33:10 PM	Main Vac valve closed
4/12/2011	6:33:10 PM	Bypass valve closed
4/12/2011	6:33:10 PM	Bubbler valve closed
4/12/2011	6:33:10 PM	Helium MFC set to  0.000000
4/12/2011	6:33:10 PM	H2 MFC set to  0.000000
4/12/2011	6:33:10 PM	BCl3 MFC set to  0.000000
4/12/2011	6:33:10 PM	PHl3 MFC set to  0.000000
4/12/2011	6:33:10 PM	SiCl4 MFC set to  0.000000
4/12/2011	6:33:10 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	6:33:10 PM	Tube furnace set to 0
4/12/2011	6:33:11 PM	Run finished at 6:33 PM
4/12/2011	6:38:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	6:38:11 PM	Recipe started at 6:38 PM
4/12/2011	6:38:11 PM	Helium valve closed
4/12/2011	6:38:11 PM	H2 valve closed
4/12/2011	6:38:11 PM	BCl3 valve closed
4/12/2011	6:38:11 PM	PH3 valve closed
4/12/2011	6:38:11 PM	SiCl4 pre valve closed
4/12/2011	6:38:11 PM	SiCl4 post valve closed
4/12/2011	6:38:11 PM	Main Vac valve closed
4/12/2011	6:38:11 PM	Bubbler valve closed
4/12/2011	6:38:11 PM	Bypass valve opened
4/12/2011	6:38:11 PM	Helium MFC set to  0.000000
4/12/2011	6:38:11 PM	H2 MFC set to  0.000000
4/12/2011	6:38:11 PM	BCl3 MFC set to  0.000000
4/12/2011	6:38:11 PM	PHl3 MFC set to  0.000000
4/12/2011	6:38:11 PM	SiCl4 MFC set to  0.000000
4/12/2011	6:38:11 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	6:38:11 PM	Tube furnace set to 0
4/12/2011	6:38:43 PM	Helium valve closed
4/12/2011	6:38:43 PM	H2 valve closed
4/12/2011	6:38:43 PM	BCl3 valve closed
4/12/2011	6:38:43 PM	PH3 valve closed
4/12/2011	6:38:43 PM	SiCl4 pre valve closed
4/12/2011	6:38:43 PM	SiCl4 post valve closed
4/12/2011	6:38:43 PM	Bubbler valve closed
4/12/2011	6:38:43 PM	Main Vac valve opened
4/12/2011	6:38:43 PM	Bypass valve opened
4/12/2011	6:38:43 PM	Helium MFC set to  0.000000
4/12/2011	6:38:43 PM	H2 MFC set to  0.000000
4/12/2011	6:38:43 PM	BCl3 MFC set to  0.000000
4/12/2011	6:38:43 PM	PHl3 MFC set to  0.000000
4/12/2011	6:38:43 PM	SiCl4 MFC set to  0.000000
4/12/2011	6:38:43 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	6:38:43 PM	Tube furnace set to 0
4/12/2011	6:38:44 PM	Run finished at 6:38 PM
4/12/2011	6:38:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	8:40:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/12/2011	8:40:01 PM	Recipe started at 8:40 PM
4/12/2011	8:40:01 PM	H2 valve closed
4/12/2011	8:40:01 PM	BCl3 valve closed
4/12/2011	8:40:01 PM	PH3 valve closed
4/12/2011	8:40:01 PM	SiCl4 pre valve closed
4/12/2011	8:40:01 PM	SiCl4 post valve closed
4/12/2011	8:40:01 PM	Main Vac valve closed
4/12/2011	8:40:01 PM	Bypass valve closed
4/12/2011	8:40:01 PM	Bubbler valve closed
4/12/2011	8:40:01 PM	Helium valve opened
4/12/2011	8:40:01 PM	Helium MFC set to  500.000000
4/12/2011	8:40:01 PM	H2 MFC set to  0.000000
4/12/2011	8:40:01 PM	BCl3 MFC set to  0.000000
4/12/2011	8:40:01 PM	PHl3 MFC set to  0.000000
4/12/2011	8:40:01 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:40:01 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:40:01 PM	Tube furnace set to 0
4/12/2011	8:41:18 PM	Helium valve closed
4/12/2011	8:41:18 PM	H2 valve closed
4/12/2011	8:41:18 PM	BCl3 valve closed
4/12/2011	8:41:18 PM	PH3 valve closed
4/12/2011	8:41:18 PM	SiCl4 pre valve closed
4/12/2011	8:41:18 PM	SiCl4 post valve closed
4/12/2011	8:41:18 PM	Main Vac valve closed
4/12/2011	8:41:18 PM	Bypass valve closed
4/12/2011	8:41:18 PM	Bubbler valve closed
4/12/2011	8:41:18 PM	Helium MFC set to  0.000000
4/12/2011	8:41:18 PM	H2 MFC set to  0.000000
4/12/2011	8:41:18 PM	BCl3 MFC set to  0.000000
4/12/2011	8:41:18 PM	PHl3 MFC set to  0.000000
4/12/2011	8:41:18 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:41:18 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:41:18 PM	Tube furnace set to 0
4/12/2011	8:41:19 PM	Run finished at 8:41 PM
4/12/2011	8:41:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/12/2011	8:49:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	8:49:50 PM	Recipe started at 8:49 PM
4/12/2011	8:49:50 PM	Helium valve closed
4/12/2011	8:49:50 PM	H2 valve closed
4/12/2011	8:49:50 PM	BCl3 valve closed
4/12/2011	8:49:50 PM	PH3 valve closed
4/12/2011	8:49:50 PM	SiCl4 pre valve closed
4/12/2011	8:49:50 PM	SiCl4 post valve closed
4/12/2011	8:49:50 PM	Main Vac valve closed
4/12/2011	8:49:50 PM	Bubbler valve closed
4/12/2011	8:49:50 PM	Bypass valve opened
4/12/2011	8:49:50 PM	Helium MFC set to  0.000000
4/12/2011	8:49:50 PM	H2 MFC set to  0.000000
4/12/2011	8:49:50 PM	BCl3 MFC set to  0.000000
4/12/2011	8:49:50 PM	PHl3 MFC set to  0.000000
4/12/2011	8:49:50 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:49:50 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:49:50 PM	Tube furnace set to 0
4/12/2011	8:50:21 PM	Helium valve closed
4/12/2011	8:50:21 PM	H2 valve closed
4/12/2011	8:50:21 PM	BCl3 valve closed
4/12/2011	8:50:21 PM	PH3 valve closed
4/12/2011	8:50:22 PM	SiCl4 pre valve closed
4/12/2011	8:50:22 PM	SiCl4 post valve closed
4/12/2011	8:50:22 PM	Bubbler valve closed
4/12/2011	8:50:22 PM	Main Vac valve opened
4/12/2011	8:50:22 PM	Bypass valve opened
4/12/2011	8:50:22 PM	Helium MFC set to  0.000000
4/12/2011	8:50:22 PM	H2 MFC set to  0.000000
4/12/2011	8:50:22 PM	BCl3 MFC set to  0.000000
4/12/2011	8:50:22 PM	PHl3 MFC set to  0.000000
4/12/2011	8:50:22 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:50:22 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:50:22 PM	Tube furnace set to 0
4/12/2011	8:50:22 PM	Run finished at 8:50 PM
4/12/2011	8:50:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/12/2011	8:55:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/12/2011	8:55:33 PM	Recipe started at 8:55 PM
4/12/2011	8:55:33 PM	Helium valve closed
4/12/2011	8:55:33 PM	H2 valve closed
4/12/2011	8:55:33 PM	BCl3 valve closed
4/12/2011	8:55:33 PM	PH3 valve closed
4/12/2011	8:55:33 PM	SiCl4 pre valve closed
4/12/2011	8:55:33 PM	SiCl4 post valve closed
4/12/2011	8:55:33 PM	Main Vac valve closed
4/12/2011	8:55:33 PM	Bubbler valve closed
4/12/2011	8:55:33 PM	Bypass valve opened
4/12/2011	8:55:33 PM	Helium MFC set to  0.000000
4/12/2011	8:55:33 PM	H2 MFC set to  0.000000
4/12/2011	8:55:33 PM	BCl3 MFC set to  0.000000
4/12/2011	8:55:33 PM	PHl3 MFC set to  0.000000
4/12/2011	8:55:33 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:55:33 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:55:33 PM	Tube furnace set to 0
4/12/2011	8:55:34 PM	Helium valve closed
4/12/2011	8:55:34 PM	H2 valve closed
4/12/2011	8:55:34 PM	BCl3 valve closed
4/12/2011	8:55:34 PM	PH3 valve closed
4/12/2011	8:55:34 PM	SiCl4 pre valve closed
4/12/2011	8:55:34 PM	SiCl4 post valve closed
4/12/2011	8:55:34 PM	Bubbler valve closed
4/12/2011	8:55:34 PM	Main Vac valve opened
4/12/2011	8:55:34 PM	Bypass valve opened
4/12/2011	8:55:34 PM	Helium MFC set to  0.000000
4/12/2011	8:55:34 PM	H2 MFC set to  0.000000
4/12/2011	8:55:34 PM	BCl3 MFC set to  0.000000
4/12/2011	8:55:34 PM	PHl3 MFC set to  0.000000
4/12/2011	8:55:34 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:55:34 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:55:34 PM	Tube furnace set to 0
4/12/2011	8:56:34 PM	H2 valve closed
4/12/2011	8:56:34 PM	BCl3 valve closed
4/12/2011	8:56:34 PM	PH3 valve closed
4/12/2011	8:56:34 PM	SiCl4 pre valve closed
4/12/2011	8:56:34 PM	SiCl4 post valve closed
4/12/2011	8:56:34 PM	Bubbler valve closed
4/12/2011	8:56:34 PM	Helium valve opened
4/12/2011	8:56:34 PM	Main Vac valve opened
4/12/2011	8:56:34 PM	Bypass valve opened
4/12/2011	8:56:34 PM	Helium MFC set to  100.000000
4/12/2011	8:56:34 PM	H2 MFC set to  0.000000
4/12/2011	8:56:34 PM	BCl3 MFC set to  0.000000
4/12/2011	8:56:34 PM	PHl3 MFC set to  0.000000
4/12/2011	8:56:34 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:56:34 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:56:34 PM	Tube furnace set to 0
4/12/2011	8:57:34 PM	Helium valve closed
4/12/2011	8:57:34 PM	H2 valve closed
4/12/2011	8:57:34 PM	BCl3 valve closed
4/12/2011	8:57:34 PM	PH3 valve closed
4/12/2011	8:57:34 PM	SiCl4 pre valve closed
4/12/2011	8:57:34 PM	SiCl4 post valve closed
4/12/2011	8:57:34 PM	Bubbler valve closed
4/12/2011	8:57:34 PM	Main Vac valve opened
4/12/2011	8:57:34 PM	Bypass valve opened
4/12/2011	8:57:34 PM	Helium MFC set to  0.000000
4/12/2011	8:57:34 PM	H2 MFC set to  0.000000
4/12/2011	8:57:34 PM	BCl3 MFC set to  0.000000
4/12/2011	8:57:34 PM	PHl3 MFC set to  0.000000
4/12/2011	8:57:34 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:57:34 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:57:34 PM	Tube furnace set to 0
4/12/2011	8:58:34 PM	H2 valve closed
4/12/2011	8:58:34 PM	BCl3 valve closed
4/12/2011	8:58:34 PM	PH3 valve closed
4/12/2011	8:58:34 PM	SiCl4 pre valve closed
4/12/2011	8:58:34 PM	SiCl4 post valve closed
4/12/2011	8:58:34 PM	Bubbler valve closed
4/12/2011	8:58:34 PM	Helium valve opened
4/12/2011	8:58:34 PM	Main Vac valve opened
4/12/2011	8:58:34 PM	Bypass valve opened
4/12/2011	8:58:34 PM	Helium MFC set to  100.000000
4/12/2011	8:58:34 PM	H2 MFC set to  0.000000
4/12/2011	8:58:34 PM	BCl3 MFC set to  0.000000
4/12/2011	8:58:34 PM	PHl3 MFC set to  0.000000
4/12/2011	8:58:34 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:58:34 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:58:34 PM	Tube furnace set to 0
4/12/2011	8:59:34 PM	Helium valve closed
4/12/2011	8:59:34 PM	H2 valve closed
4/12/2011	8:59:34 PM	BCl3 valve closed
4/12/2011	8:59:34 PM	PH3 valve closed
4/12/2011	8:59:34 PM	SiCl4 pre valve closed
4/12/2011	8:59:34 PM	SiCl4 post valve closed
4/12/2011	8:59:34 PM	Bubbler valve closed
4/12/2011	8:59:34 PM	Main Vac valve opened
4/12/2011	8:59:34 PM	Bypass valve opened
4/12/2011	8:59:34 PM	Helium MFC set to  0.000000
4/12/2011	8:59:34 PM	H2 MFC set to  0.000000
4/12/2011	8:59:34 PM	BCl3 MFC set to  0.000000
4/12/2011	8:59:34 PM	PHl3 MFC set to  0.000000
4/12/2011	8:59:34 PM	SiCl4 MFC set to  0.000000
4/12/2011	8:59:34 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	8:59:34 PM	Tube furnace set to 0
4/12/2011	9:00:35 PM	H2 valve closed
4/12/2011	9:00:35 PM	BCl3 valve closed
4/12/2011	9:00:35 PM	PH3 valve closed
4/12/2011	9:00:35 PM	SiCl4 pre valve closed
4/12/2011	9:00:35 PM	SiCl4 post valve closed
4/12/2011	9:00:35 PM	Bubbler valve closed
4/12/2011	9:00:35 PM	Helium valve opened
4/12/2011	9:00:35 PM	Main Vac valve opened
4/12/2011	9:00:35 PM	Bypass valve opened
4/12/2011	9:00:35 PM	Helium MFC set to  100.000000
4/12/2011	9:00:35 PM	H2 MFC set to  0.000000
4/12/2011	9:00:35 PM	BCl3 MFC set to  0.000000
4/12/2011	9:00:35 PM	PHl3 MFC set to  0.000000
4/12/2011	9:00:35 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:00:35 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:00:35 PM	Tube furnace set to 0
4/12/2011	9:01:35 PM	Helium valve closed
4/12/2011	9:01:35 PM	H2 valve closed
4/12/2011	9:01:35 PM	BCl3 valve closed
4/12/2011	9:01:35 PM	PH3 valve closed
4/12/2011	9:01:35 PM	SiCl4 pre valve closed
4/12/2011	9:01:35 PM	SiCl4 post valve closed
4/12/2011	9:01:35 PM	Bubbler valve closed
4/12/2011	9:01:35 PM	Main Vac valve opened
4/12/2011	9:01:35 PM	Bypass valve opened
4/12/2011	9:01:35 PM	Helium MFC set to  0.000000
4/12/2011	9:01:35 PM	H2 MFC set to  0.000000
4/12/2011	9:01:35 PM	BCl3 MFC set to  0.000000
4/12/2011	9:01:35 PM	PHl3 MFC set to  0.000000
4/12/2011	9:01:35 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:01:35 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:01:35 PM	Tube furnace set to 0
4/12/2011	9:02:35 PM	H2 valve closed
4/12/2011	9:02:35 PM	BCl3 valve closed
4/12/2011	9:02:35 PM	PH3 valve closed
4/12/2011	9:02:35 PM	SiCl4 pre valve closed
4/12/2011	9:02:35 PM	SiCl4 post valve closed
4/12/2011	9:02:35 PM	Bubbler valve closed
4/12/2011	9:02:35 PM	Helium valve opened
4/12/2011	9:02:35 PM	Main Vac valve opened
4/12/2011	9:02:35 PM	Bypass valve opened
4/12/2011	9:02:35 PM	Helium MFC set to  100.000000
4/12/2011	9:02:35 PM	H2 MFC set to  0.000000
4/12/2011	9:02:35 PM	BCl3 MFC set to  0.000000
4/12/2011	9:02:35 PM	PHl3 MFC set to  0.000000
4/12/2011	9:02:35 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:02:35 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:02:35 PM	Tube furnace set to 0
4/12/2011	9:03:35 PM	Helium valve closed
4/12/2011	9:03:35 PM	H2 valve closed
4/12/2011	9:03:35 PM	BCl3 valve closed
4/12/2011	9:03:35 PM	PH3 valve closed
4/12/2011	9:03:35 PM	SiCl4 pre valve closed
4/12/2011	9:03:35 PM	SiCl4 post valve closed
4/12/2011	9:03:35 PM	Bubbler valve closed
4/12/2011	9:03:35 PM	Main Vac valve opened
4/12/2011	9:03:35 PM	Bypass valve opened
4/12/2011	9:03:35 PM	Helium MFC set to  0.000000
4/12/2011	9:03:35 PM	H2 MFC set to  0.000000
4/12/2011	9:03:35 PM	BCl3 MFC set to  0.000000
4/12/2011	9:03:35 PM	PHl3 MFC set to  0.000000
4/12/2011	9:03:35 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:03:35 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:03:35 PM	Tube furnace set to 0
4/12/2011	9:04:35 PM	H2 valve closed
4/12/2011	9:04:35 PM	BCl3 valve closed
4/12/2011	9:04:35 PM	PH3 valve closed
4/12/2011	9:04:35 PM	SiCl4 pre valve closed
4/12/2011	9:04:35 PM	SiCl4 post valve closed
4/12/2011	9:04:35 PM	Bubbler valve closed
4/12/2011	9:04:35 PM	Helium valve opened
4/12/2011	9:04:35 PM	Main Vac valve opened
4/12/2011	9:04:35 PM	Bypass valve opened
4/12/2011	9:04:35 PM	Helium MFC set to  100.000000
4/12/2011	9:04:35 PM	H2 MFC set to  0.000000
4/12/2011	9:04:35 PM	BCl3 MFC set to  0.000000
4/12/2011	9:04:35 PM	PHl3 MFC set to  0.000000
4/12/2011	9:04:35 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:04:35 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:04:35 PM	Tube furnace set to 0
4/12/2011	9:05:36 PM	Helium valve closed
4/12/2011	9:05:36 PM	H2 valve closed
4/12/2011	9:05:36 PM	BCl3 valve closed
4/12/2011	9:05:36 PM	PH3 valve closed
4/12/2011	9:05:36 PM	SiCl4 pre valve closed
4/12/2011	9:05:36 PM	SiCl4 post valve closed
4/12/2011	9:05:36 PM	Bubbler valve closed
4/12/2011	9:05:36 PM	Main Vac valve opened
4/12/2011	9:05:36 PM	Bypass valve opened
4/12/2011	9:05:36 PM	Helium MFC set to  0.000000
4/12/2011	9:05:36 PM	H2 MFC set to  0.000000
4/12/2011	9:05:36 PM	BCl3 MFC set to  0.000000
4/12/2011	9:05:36 PM	PHl3 MFC set to  0.000000
4/12/2011	9:05:36 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:05:36 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:05:36 PM	Tube furnace set to 0
4/12/2011	9:06:36 PM	H2 valve closed
4/12/2011	9:06:36 PM	BCl3 valve closed
4/12/2011	9:06:36 PM	PH3 valve closed
4/12/2011	9:06:36 PM	SiCl4 pre valve closed
4/12/2011	9:06:36 PM	SiCl4 post valve closed
4/12/2011	9:06:36 PM	Bubbler valve closed
4/12/2011	9:06:36 PM	Helium valve opened
4/12/2011	9:06:36 PM	Main Vac valve opened
4/12/2011	9:06:36 PM	Bypass valve opened
4/12/2011	9:06:36 PM	Helium MFC set to  100.000000
4/12/2011	9:06:36 PM	H2 MFC set to  0.000000
4/12/2011	9:06:36 PM	BCl3 MFC set to  0.000000
4/12/2011	9:06:36 PM	PHl3 MFC set to  0.000000
4/12/2011	9:06:36 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:06:36 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:06:36 PM	Tube furnace set to 0
4/12/2011	9:07:36 PM	Helium valve closed
4/12/2011	9:07:36 PM	H2 valve closed
4/12/2011	9:07:36 PM	BCl3 valve closed
4/12/2011	9:07:36 PM	PH3 valve closed
4/12/2011	9:07:36 PM	SiCl4 pre valve closed
4/12/2011	9:07:36 PM	SiCl4 post valve closed
4/12/2011	9:07:36 PM	Bubbler valve closed
4/12/2011	9:07:36 PM	Main Vac valve opened
4/12/2011	9:07:36 PM	Bypass valve opened
4/12/2011	9:07:36 PM	Helium MFC set to  0.000000
4/12/2011	9:07:36 PM	H2 MFC set to  0.000000
4/12/2011	9:07:36 PM	BCl3 MFC set to  0.000000
4/12/2011	9:07:36 PM	PHl3 MFC set to  0.000000
4/12/2011	9:07:36 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:07:36 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:07:36 PM	Tube furnace set to 0
4/12/2011	9:08:36 PM	H2 valve closed
4/12/2011	9:08:36 PM	BCl3 valve closed
4/12/2011	9:08:36 PM	PH3 valve closed
4/12/2011	9:08:36 PM	SiCl4 pre valve closed
4/12/2011	9:08:36 PM	SiCl4 post valve closed
4/12/2011	9:08:36 PM	Bubbler valve closed
4/12/2011	9:08:36 PM	Helium valve opened
4/12/2011	9:08:36 PM	Main Vac valve opened
4/12/2011	9:08:36 PM	Bypass valve opened
4/12/2011	9:08:36 PM	Helium MFC set to  100.000000
4/12/2011	9:08:36 PM	H2 MFC set to  0.000000
4/12/2011	9:08:36 PM	BCl3 MFC set to  0.000000
4/12/2011	9:08:36 PM	PHl3 MFC set to  0.000000
4/12/2011	9:08:36 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:08:36 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:08:36 PM	Tube furnace set to 0
4/12/2011	9:09:36 PM	Helium valve closed
4/12/2011	9:09:36 PM	H2 valve closed
4/12/2011	9:09:36 PM	BCl3 valve closed
4/12/2011	9:09:36 PM	PH3 valve closed
4/12/2011	9:09:36 PM	SiCl4 pre valve closed
4/12/2011	9:09:36 PM	SiCl4 post valve closed
4/12/2011	9:09:36 PM	Bubbler valve closed
4/12/2011	9:09:36 PM	Main Vac valve opened
4/12/2011	9:09:36 PM	Bypass valve opened
4/12/2011	9:09:36 PM	Helium MFC set to  0.000000
4/12/2011	9:09:36 PM	H2 MFC set to  0.000000
4/12/2011	9:09:36 PM	BCl3 MFC set to  0.000000
4/12/2011	9:09:36 PM	PHl3 MFC set to  0.000000
4/12/2011	9:09:36 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:09:36 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:09:37 PM	Tube furnace set to 0
4/12/2011	9:10:37 PM	H2 valve closed
4/12/2011	9:10:37 PM	BCl3 valve closed
4/12/2011	9:10:37 PM	PH3 valve closed
4/12/2011	9:10:37 PM	SiCl4 pre valve closed
4/12/2011	9:10:37 PM	SiCl4 post valve closed
4/12/2011	9:10:37 PM	Bubbler valve closed
4/12/2011	9:10:37 PM	Helium valve opened
4/12/2011	9:10:37 PM	Main Vac valve opened
4/12/2011	9:10:37 PM	Bypass valve opened
4/12/2011	9:10:37 PM	Helium MFC set to  100.000000
4/12/2011	9:10:37 PM	H2 MFC set to  0.000000
4/12/2011	9:10:37 PM	BCl3 MFC set to  0.000000
4/12/2011	9:10:37 PM	PHl3 MFC set to  0.000000
4/12/2011	9:10:37 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:10:37 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:10:37 PM	Tube furnace set to 0
4/12/2011	9:11:37 PM	Helium valve closed
4/12/2011	9:11:37 PM	H2 valve closed
4/12/2011	9:11:37 PM	BCl3 valve closed
4/12/2011	9:11:37 PM	PH3 valve closed
4/12/2011	9:11:37 PM	SiCl4 pre valve closed
4/12/2011	9:11:37 PM	SiCl4 post valve closed
4/12/2011	9:11:37 PM	Bubbler valve closed
4/12/2011	9:11:37 PM	Main Vac valve opened
4/12/2011	9:11:37 PM	Bypass valve opened
4/12/2011	9:11:37 PM	Helium MFC set to  0.000000
4/12/2011	9:11:37 PM	H2 MFC set to  0.000000
4/12/2011	9:11:37 PM	BCl3 MFC set to  0.000000
4/12/2011	9:11:37 PM	PHl3 MFC set to  0.000000
4/12/2011	9:11:37 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:11:37 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:11:37 PM	Tube furnace set to 0
4/12/2011	9:12:37 PM	H2 valve closed
4/12/2011	9:12:37 PM	BCl3 valve closed
4/12/2011	9:12:37 PM	PH3 valve closed
4/12/2011	9:12:37 PM	SiCl4 pre valve closed
4/12/2011	9:12:37 PM	SiCl4 post valve closed
4/12/2011	9:12:37 PM	Bubbler valve closed
4/12/2011	9:12:37 PM	Helium valve opened
4/12/2011	9:12:37 PM	Main Vac valve opened
4/12/2011	9:12:37 PM	Bypass valve opened
4/12/2011	9:12:37 PM	Helium MFC set to  100.000000
4/12/2011	9:12:37 PM	H2 MFC set to  0.000000
4/12/2011	9:12:37 PM	BCl3 MFC set to  0.000000
4/12/2011	9:12:37 PM	PHl3 MFC set to  0.000000
4/12/2011	9:12:37 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:12:37 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:12:37 PM	Tube furnace set to 0
4/12/2011	9:13:37 PM	Helium valve closed
4/12/2011	9:13:37 PM	H2 valve closed
4/12/2011	9:13:37 PM	BCl3 valve closed
4/12/2011	9:13:37 PM	PH3 valve closed
4/12/2011	9:13:37 PM	SiCl4 pre valve closed
4/12/2011	9:13:37 PM	SiCl4 post valve closed
4/12/2011	9:13:37 PM	Bubbler valve closed
4/12/2011	9:13:37 PM	Main Vac valve opened
4/12/2011	9:13:37 PM	Bypass valve opened
4/12/2011	9:13:37 PM	Helium MFC set to  0.000000
4/12/2011	9:13:37 PM	H2 MFC set to  0.000000
4/12/2011	9:13:37 PM	BCl3 MFC set to  0.000000
4/12/2011	9:13:37 PM	PHl3 MFC set to  0.000000
4/12/2011	9:13:37 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:13:37 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:13:37 PM	Tube furnace set to 0
4/12/2011	9:14:37 PM	H2 valve closed
4/12/2011	9:14:37 PM	BCl3 valve closed
4/12/2011	9:14:37 PM	PH3 valve closed
4/12/2011	9:14:37 PM	SiCl4 pre valve closed
4/12/2011	9:14:37 PM	SiCl4 post valve closed
4/12/2011	9:14:37 PM	Bubbler valve closed
4/12/2011	9:14:37 PM	Helium valve opened
4/12/2011	9:14:37 PM	Main Vac valve opened
4/12/2011	9:14:37 PM	Bypass valve opened
4/12/2011	9:14:37 PM	Helium MFC set to  100.000000
4/12/2011	9:14:37 PM	H2 MFC set to  0.000000
4/12/2011	9:14:37 PM	BCl3 MFC set to  0.000000
4/12/2011	9:14:37 PM	PHl3 MFC set to  0.000000
4/12/2011	9:14:37 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:14:37 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:14:38 PM	Tube furnace set to 0
4/12/2011	9:15:38 PM	Helium valve closed
4/12/2011	9:15:38 PM	H2 valve closed
4/12/2011	9:15:38 PM	BCl3 valve closed
4/12/2011	9:15:38 PM	PH3 valve closed
4/12/2011	9:15:38 PM	SiCl4 pre valve closed
4/12/2011	9:15:38 PM	SiCl4 post valve closed
4/12/2011	9:15:38 PM	Bubbler valve closed
4/12/2011	9:15:38 PM	Main Vac valve opened
4/12/2011	9:15:38 PM	Bypass valve opened
4/12/2011	9:15:38 PM	Helium MFC set to  0.000000
4/12/2011	9:15:38 PM	H2 MFC set to  0.000000
4/12/2011	9:15:38 PM	BCl3 MFC set to  0.000000
4/12/2011	9:15:38 PM	PHl3 MFC set to  0.000000
4/12/2011	9:15:38 PM	SiCl4 MFC set to  0.000000
4/12/2011	9:15:38 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	9:15:38 PM	Tube furnace set to 0
4/12/2011	9:15:39 PM	Run finished at 9:15 PM
4/12/2011	9:15:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/12/2011	10:51:41 PM	Recipe started at 10:51 PM
4/12/2011	10:51:41 PM	BCl3 valve closed
4/12/2011	10:51:41 PM	PH3 valve closed
4/12/2011	10:51:41 PM	SiCl4 pre valve closed
4/12/2011	10:51:41 PM	SiCl4 post valve closed
4/12/2011	10:51:41 PM	Main Vac valve closed
4/12/2011	10:51:41 PM	Bypass valve closed
4/12/2011	10:51:41 PM	Bubbler valve closed
4/12/2011	10:51:41 PM	Helium valve opened
4/12/2011	10:51:41 PM	H2 valve opened
4/12/2011	10:51:41 PM	Helium MFC set to  47.500000
4/12/2011	10:51:41 PM	H2 MFC set to  2.500000
4/12/2011	10:51:41 PM	BCl3 MFC set to  0.000000
4/12/2011	10:51:41 PM	PHl3 MFC set to  0.000000
4/12/2011	10:51:41 PM	SiCl4 MFC set to  0.000000
4/12/2011	10:51:41 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	10:51:41 PM	Tube furnace set to 0
4/12/2011	11:05:28 PM	BCl3 valve closed
4/12/2011	11:05:28 PM	PH3 valve closed
4/12/2011	11:05:28 PM	SiCl4 pre valve closed
4/12/2011	11:05:28 PM	SiCl4 post valve closed
4/12/2011	11:05:28 PM	Main Vac valve closed
4/12/2011	11:05:28 PM	Bypass valve closed
4/12/2011	11:05:28 PM	Helium valve opened
4/12/2011	11:05:28 PM	H2 valve opened
4/12/2011	11:05:28 PM	Bubbler valve opened
4/12/2011	11:05:28 PM	Helium MFC set to  47.500000
4/12/2011	11:05:28 PM	H2 MFC set to  2.500000
4/12/2011	11:05:28 PM	BCl3 MFC set to  0.000000
4/12/2011	11:05:28 PM	PHl3 MFC set to  0.000000
4/12/2011	11:05:28 PM	SiCl4 MFC set to  0.000000
4/12/2011	11:05:28 PM	Bypass solenoid MFC set to  0.000000
4/12/2011	11:05:28 PM	Tube furnace set to 350
